Manipulators

5-Achsen-Manipu-für-Raster-X-Y1

5-axes-manipulator for scanning electron microscopes SEM

for FEI Company for samples up to Ø 5 Inches and a weight of up to 2 kg.

 
Travel  
X- and Y-axis: 155 mm
Z-axis: 10 mm
T-axis: -10° + 60°
R-axis: 360°
   
X-, Y- und R-axis are equipped with Piezo-motors.
   
Accuracy: 0.5 µm
Repeatability: 1 µm
Resolution: 0.2 µm (Heidenhain measuring-system)

5-Achsen-Manipu-für-Raster1

5-axes-manipulator for scanning electron microscopes SEM

for company Zeiss for samples up to Ø 4 Inches and a weight of up to 2 kg.

   
Travel  
X- and Y-axis: 130 mm
Z-axis: 50 mm
T-axis: -4° + 70°
R-axis: 360°
   

X-, Y- und R-axis are equipped with vacuum-compatible stepper motors.

   
Accuracy: 0.5 µm
Repeatability: 2 µm

Manipulator-für-Raster1

5-axes-manipulator for scanning electron microscopes SEM

for FEI Company for samples up to Ø 4 Inches and a weight of up to 2 kg.

   
Travel  
X- and Y-axis: 100 mm
Z-axis: 65 mm
T-axis: -4° + 70°
R-axis: 360°
   
Axes are driven by DC-Motors assembled outside vacuum. Accuracy of  X- and Y-spindle is ensured by encoders.
   
Accuracy: 0.5 µm
Repeatability: 3 µm

3

UHV-4-axes-manipulator

   
Travel
X- and Y-axis: 315 mm
Z-axis: 25 mm
   
X- and Y-axis are equipped with Piezo-motors.
   
Accuracy: 0.5 µm
Repeatability: 20 µm
Measuring system: Renishaw

5-Achsen-Manipu-für-UHV-A1

UHV-5-axes-manipulator

for company ION-TOF for samples up to Ø 8 Inches and a weight of up to 1 kg.

   
Travel  
X-axis: 100 mm
Y-axis 70 mm
Z-axis: 30 mm
T-axis:

-15° + 45°

R-axis: 360°
   
Axes are  driven by DC-motors assembled outside vacuum.
   
Accuracy: 1 µm
Repeatability: 3 µm

probenscanner1

High-precision probescanner / manipulator

 
Travel  
X- and Y-axis: 130 mm
Z-axis: 40 mm

Modul-für-Heiz-und-Zugversuche1

Module for heating- and tensile tests

assembled on top of a 5-axes-manipulator for SEM, tensile force 1000 kg.

   

With this tensile module values of mechanical strain can be measured while changes of the sample surface can be observed in a SEM at the same time.